mechanical roughing pump using method

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  • MECHANICAL PUMPS - CERN

    2008-8-12 · considered to give guidelines for the design of roughing stations. 1. INTRODUCTION The development of mechanical pumps was intimately linked with the progress of vacuum science up to the middle of this century when the introduction of both the sputter ion pump and the sublimation pump provided an alternate method for the production of low pressure.

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  • Edwards RV3-Mechanical Roughing Pump - Parts &

    All orders placed over 2000.00 (U.S.) must obtain pre-approval with an acceptable method of payment, as established by our credit and fraud avoidance department. We may require additional verifications or information before accepting any order. ... Edwards E2M1.5-Mechanical Roughing Pump.

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  • MEMS-Scale Turbomachinery Based Vacuum

    2014-7-15 · The method of specifying the wall shear stress is then applied to a generic MEMS scale roughing pump stage that consists of two stators and a rotor operating at a nominal absolute pressure of 500 Pa. The zero flow case was simulated in all cases as the pump down time for these machines is small due to the small volume being evacuated.

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  • MEMS-Scale Turbomachinery Based Vacuum

    This study forms part of a program to develop a micro-electro-mechanical-systems (MEMS) scale turbomachinery based vacuum pump and investigates the roughing portion of such a system.

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  • Mechanical roughing of cylinder bores in light metal ...

    2008-6-21 · Summarized, the mechanical roughing shows some strong advantages which make the procedure competitive to the state-of-the-art-pretreatment methods. In future it might be possible to combine the fine boring with the mechanical roughing procedure. The mechanical roughing process is not restricted to machine crankcase bores only.

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  • DESIGN OF ROTARY, TURBO-MOLECULAR AND CRYO-

    2014-8-25 · roughing and backing, a suitable rotary pump is fitted with this pump. Since Mass spectroscopic leak detection [5] is most commonly used leak detection method in vacuum systems, we proposed one MSLD with turbo-molecular pump. Bill of material for the turbo pump is also prepared and handed over to department.

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  • Kurt J. Lesker Company | Pump Classifications

    Gas Removal Method: Gas Transfer Pump Design: Oil-Sealed ... a turbo with magnetically levitated bearings backed by a dry mechanical pump are used. With proper venting, the turbo mechanism stops in less than a minute, which may mean chamber venting is accomplished without the need for a valve separating pump and chamber. ... a separate roughing ...

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  • VACUUM TECHNIQUES - UC Santa Barbara

    2007-11-26 · ineffective. The use of those pumps must be preceded by another pump, called a 'forepump' or a 'roughing pump', which brings the pressure in the vessel within their working range. Usually pumps which require a forepump require a backing pump as well. The backing pump is used to extract residual gases from the main pump to keep it at low

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  • Turbo-V Pump Technical Notes - University of Minnesota

    2008-4-21 · a. the roughing time b. the minimum recommended backing pump of the turbo a. Roughing: once the desired roughing time is established, the size of the forepump can be determined through the following formula: Sforeline = (V t) ln (p 0 p 1) where S foreline is the pumping speed of the roughing pump (l/min) V is the volume of the chamber to be evacuated (l)

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  • [Basic Knowledge about Cryopumps 2 ] | ULVAC

    Meanwhile, if dry pump is used as roughing pump, the chamber can be rough pumped below 13Pa without any trouble. (2)Open the main valve and start cryopumping the chamber. (3)When the pressure inside the chamber has reached specified value, you can proceed to the main process such as vapor deposition and sputtering, etc.

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  • Mechanical/Roughing pump – Diffusion pump – Roots

    2010-3-1 · – Mechanical/Roughing pump – Diffusion pump – Roots blower –Cryopump – Turbo (molecular pump) 3/1/2010 Nanofabrication 1 • 1 Pascal = 1N/m2 • 1 atm = 760 mm Hg = 760 Torr • 1 atm = 1.0 x 105 Pa • 1 micron = 1 μm Hg = 1mTorr • 1 atm = 15 psi 3/1/2010 Nanofabrication 2

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  • MEMS-Scale Turbomachinery Based Vacuum

    2013-11-14 · The method of specifying the wall-shear stress is then applied to a generic MEMS scale roughing pump stage that consists of two stators and a rotor operating at a nominal absolute pressure of 500 Pa. The zero flow case was simulated in all cases as the pump down time for these machines is small due to the small volume being evacuated.

    Get Price
  • MECHANICAL PUMPS - CERN

    2008-8-12 · considered to give guidelines for the design of roughing stations. 1. INTRODUCTION The development of mechanical pumps was intimately linked with the progress of vacuum science up to the middle of this century when the introduction of both the sputter ion pump and the sublimation pump provided an alternate method for the production of low pressure.

    Get Price
  • MEMS-Scale Turbomachinery Based Vacuum

    2014-7-15 · The method of specifying the wall shear stress is then applied to a generic MEMS scale roughing pump stage that consists of two stators and a rotor operating at a nominal absolute pressure of 500 Pa. The zero flow case was simulated in all cases as the pump down time for these machines is small due to the small volume being evacuated.

    Get Price
  • Mechanical Booster Pump [PRC Series] - ULVAC

    2018-1-31 · By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness.

    Get Price
  • Kurt J. Lesker Company | Pump Classifications

    Gas Removal Method: Gas Transfer Pump Design: Oil-Sealed ... a turbo with magnetically levitated bearings backed by a dry mechanical pump are used. With proper venting, the turbo mechanism stops in less than a minute, which may mean chamber venting is accomplished without the need for a valve separating pump and chamber. ... a separate roughing ...

    Get Price
  • Turbo-V Pump Technical Notes - University of Minnesota

    2008-4-21 · foreline is the pumping speed of the roughing pump (l/min) V is the volume of the chamber to be evacuated (l) t is the desired roughing time (min) p 0 is the starting pressure (mbar) p 1 is the end pressure (mbar) When using a foreline pump much larger than the recommended size, a by-pass line might be necessary to achieve calculated roughing ...

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  • Analysis Mechanical Behavior of Hydrodynamic Gear

    2014-12-29 · Analysis Mechanical Behavior of Hydrodynamic Gear Pump using Taghuchi and Response Surface Method C. Raghunathan* and C. Manoharan * King College of Technology, Nallur, Namakkal – 637 020, Tamil Nadu, India King College of Technology, Nallur, Namakkal – 637 020, Tamil Nadu, India Abstract--This analysis study is focused on the numerous

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  • Kurt J. Lesker Company | Pumping Speed | Vacuum

    Perhaps worse, pump manufacturers measure the ultimate pressure of mechanical pumps using a McLeod gauge that cannot measure vapors such as pump oil and water. Consequently, the so-called ultimate (partial) pressure of a rotary vane pump may be quoted in the 10 -5 Torr range, causing much confusion when the practical ultimate pressure (using a ...

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  • Vacuum Pump Technology: Multi-Stage Air-Driven vs.

    But within the vacuum pump arena, there are a number of different players, each creating vacuum by using greatly different methods. Two ways to reduce the pressure The two most popular vacuum pump contenders are compressed air-driven pumps, commonly referred to as generators, and electro-mechanical pumps.

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  • How To Choose a Roughing/Backing Pump for the

    Using the wrong roughing/backing pump can easily negate all the careful work that went into choosing the high vacuum pump by causing it to operate outside its maximum performance envelope. The continued difficulty in choosing a roughing/backing pump is not aided by many of the high vacuum pump manufacturers because their literature focuses on ...

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  • Chapter 10: Turbomolecular Pumps

    2002-10-28 · Close the foreline valve and turn off the mechanical pump. 5. Vent the roughing line. 6. Open the air admittance valve on the turbo pump to gradually bring the pump to atmospheric pressure. 7. Open the vacuum vessel vent valve. *Check manufacturer's suggested crossover pressure for the particular pump you are using. Sample Problem:

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  • Vacuum technology - Physics

    2008-8-26 · Generally, each pump will have its own unique combination of strengths and weaknesses in terms of expense, durability, pumping speed vs. pressure, residual gases, and ease of use. 1. Roughing pumps (1 atmosphere to 1-10 micron)-Rotary vane (oil) mechanical pumps. low cost,durable, long life. high pumping speed. oil-backstreaming must be controlled

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  • Pumps 101: Operation, Maintenance and Monitoring Basics

    2012-8-31 · There are limitations using just suction and discharge pressure measurements. If the pump is operated by a variable speed device, pump speed must be factored in using the affinity laws, which state the change in TDH is proportional to Speed^2. It is also difficult to determine pump wear.

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  • A Simplified Method of Determining the Efficiency of

    2016-7-14 · A common concern in processing plants is determining the pumping health—or efficiency—of centrifugal pumps. As pump impeller seals wear as a result of erosion and corrosion mechanisms, tight internal clearances open up and allow fluid to recirculate internally, gradually degrading performance. As wear progresses, a centrifugal pump will eventually become unable to perform its intended ...

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  • Design & Analysis of Centrifugal Pump Impeller by FEA

    2016-4-23 · Design & Analysis of Centrifugal Pump Impeller by FEA Mane Pranav Rajanand, ME Student, Department of Mechanical Engineering V.V.P. Institute of Engineering & Technology, Solapur, Maharashtra, India -----***-----Abstract - A centrifugal pump is a rot dynamic pump that uses a rotating impeller to increase the pressure of a fluid.

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  • Experiment (9): Centrifugal pump Introduction

    2014-1-7 · The mechanical power input to the pump may be calculated as: P m = rotational force x angular distance = 2.π.n.t/60 where n is the rotational speed of pump in revolutions per minute and t is the shaft torque in N.m . The efficiency of the pump may be calculated as : Where Q is the volume flow rate in 3m /s, and P m

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  • DEVELOPMENT OF AN IMPROVED PEDAL POWERED

    2016-9-9 · mechanical principles, which are to a great extent independent of each other [3]. The five principles are as follows: 1. Direct lift this method of lifting water - involves physically lifting water using a container. It is by far the most popular method of lifting water. 2. Displacement -this method of lifting water utilizes the fact that water is

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  • Mechanical properties of CFF/MC/SF composite

    2017-1-1 · Mechanical properties of CFF/MC/SF composite prepared using vacuum infusion impregnation method. ... Using vacuum infusion method to infiltrate slurry of MC, SF, and water into CFF. ... Vacuum-infusion process utilized 2XZ-8-type direct-connected high-speed rotary-vane vacuum pump, ceramic funnel, and other self-assembled devices .

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  • Sogevac single stage mechanical roughing pumps

    2021-7-30 · Roughing Vacuum Systems. The SOGEVAC series is a single stage vacuum pump used in industrial and vacuum systems applications. SOGEVAC is an oil sealed vacuum pump, so the oil in the pump helps form the vacuum. The comprehensive range of the SOGEVAC (pumping speeds ranging from 10 to 1200 m 3 /h (5.9 to 707 cfm)) allows for vacuum pumping from ...

    Get Price
  • How To Choose a Roughing/Backing Pump for the

    Using the wrong roughing/backing pump can easily negate all the careful work that went into choosing the high vacuum pump by causing it to operate outside its maximum performance envelope. The continued difficulty in choosing a roughing/backing pump is not aided by many of the high vacuum pump manufacturers because their literature focuses on ...

    Get Price
  • DESIGN OF ROTARY, TURBO-MOLECULAR AND CRYO-

    2014-8-25 · roughing and backing, a suitable rotary pump is fitted with this pump. Since Mass spectroscopic leak detection [5] is most commonly used leak detection method in vacuum systems, we proposed one MSLD with turbo-molecular pump. Bill of material for the turbo pump is also prepared and handed over to department.

    Get Price
  • Mechanical booster pumps | Support|ULVAC KIKO Inc.

    Features of Mechanical booster pumps. The pump increases the pumping speed drastically in the pressure range where the pumping speed of the roughing pump decreases bycombining with a roughing pump such as an oil rotary vacuum pump and a dry pump. Strength: The pumping speed dramatically increases in the region from 10 KPa to 0.1 Pa.

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  • Turbo-V Pump Technical Notes - University of Minnesota

    2008-4-21 · foreline is the pumping speed of the roughing pump (l/min) V is the volume of the chamber to be evacuated (l) t is the desired roughing time (min) p 0 is the starting pressure (mbar) p 1 is the end pressure (mbar) When using a foreline pump much larger than the recommended size, a by-pass line might be necessary to achieve calculated roughing ...

    Get Price
  • Mechanical Booster Pumps PRC Series | ULVAC ...

    By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness.

    Get Price
  • Fomblin - Solvay

    2018-7-13 · The Roughing Pump To obtain maximum benefit from the use of Fomblin ® PFPE in the diffusion pump, it is desirable to minimize backstreaming of hydrocarbon vapors from the mechanical roughing pump. This can only be assured by changing the fluid in the roughing pump to the appropriate Fomblin ® Y LVAC fluid, such as Y LVAC 06/6, 14/6, or 25/6. If

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  • Pumps 101: Operation, Maintenance and Monitoring Basics

    2012-8-31 · There are limitations using just suction and discharge pressure measurements. If the pump is operated by a variable speed device, pump speed must be factored in using the affinity laws, which state the change in TDH is proportional to Speed^2. It is also difficult to determine pump wear.

    Get Price
  • DEVELOPMENT OF AN IMPROVED PEDAL POWERED

    2016-9-9 · mechanical principles, which are to a great extent independent of each other [3]. The five principles are as follows: 1. Direct lift this method of lifting water - involves physically lifting water using a container. It is by far the most popular method of lifting water. 2. Displacement -this method of lifting water utilizes the fact that water is

    Get Price
  • Mechanical Booster Pumps PRC Series | ULVAC

    Mechanical Booster Pumps PRC Series. By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes ...

    Get Price
  • Sogevac single stage mechanical roughing pumps

    2021-7-30 · Roughing Vacuum Systems. The SOGEVAC series is a single stage vacuum pump used in industrial and vacuum systems applications. SOGEVAC is an oil sealed vacuum pump, so the oil in the pump helps form the vacuum. The comprehensive range of the SOGEVAC (pumping speeds ranging from 10 to 1200 m 3 /h (5.9 to 707 cfm)) allows for vacuum pumping from ...

    Get Price
  • Roughing pump in high-vacuum furnaces for

    2016-9-2 · The mechanical pump vent valve serves to admit atmosphere to the roughing line, thus bringing the mechanical pump to atmospheric pressure. It is used when shutting down the system; the diffusion pump is turned off and allowed to cool, and then the mechanical pump is turned off. Bringing the stopped mechanical pump to

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  • Description of a Basic Vacuum System

    2021-6-29 · Roughing Pump – Daily Maintenance • Oil level: Pump “running” - Correct oil level is center of sight glass • Add oil if required - Pump should not run with low oil level • Check and drain drip leg Oil condition: - Good oil is clean and has good clarity. - Cloudy or milky oil shows presence of moisture

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  • Typical Vacuum Pumping System - Solar Atmospheres

    2012-8-31 · There are limitations using just suction and discharge pressure measurements. If the pump is operated by a variable speed device, pump speed must be factored in using the affinity laws, which state the change in TDH is proportional to Speed^2. It is also difficult to determine pump wear.

    Get Price
  • Pumps 101: Operation, Maintenance and Monitoring Basics

    2018-5-5 · A pump is a device that moves fluids by mechanical action. It can be classified majorly into three groups according to the method used to move the fluid: direct lift, displacement, and gravity pumps [1]. The mode of operation of pumps is either via reciprocating or rotary and energy is consume in performing the mechanical

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  • Development and Construction of a Sliding Vane Pump

    2018-12-18 · Mechanical Deflection & Thermal Transfer Gauges Capacitance Manometer Thermocouple Convection Pirani High Vacuum 10-3-10-9 Mechanical Deflection & Ionization Gauges Capacitance Manometer Hot Ion Gauge (BAG) Cold Cathode Ultra High Vacuum < 10-10 Ionization Gauges & Gas Analyzers UHV Ionization Gauges Ion Pump Current Residual Gas Analyzer (RGA)

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  • and troubleshooting Rough Vacuum Specifically, today’s ...

    2016-9-9 · mechanical principles, which are to a great extent independent of each other [3]. The five principles are as follows: 1. Direct lift this method of lifting water - involves physically lifting water using a container. It is by far the most popular method of lifting water. 2. Displacement -this method of lifting water utilizes the fact that water is

    Get Price
  • DEVELOPMENT OF AN IMPROVED PEDAL POWERED

    2019-10-30 · automatic detection method of centrifugal pump using time–frequency features. Muralidharan and Sugumaran7,8 proposed fault diagnosis methods of monoblock centrifugal pump using wavelet features. Azizi et al.9 presented a hybrid feature selection tech-nique for cavitation severity in centrifugal pump. Yu et al.10 proposed a principal component ...

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  • Advances in Mechanical Engineering 2019, Vol. 11(9)

    Mechanical pulping is the original form of pulping. It has been largely replaced by chemical pulping, is still used for lower grade papers such as newsprint, and is the only process used for recycled paper (Casey, 1983a).Mechanical pulping relies more so on mechanical actions to separate and develop wood fibers, rather than using chemical means.

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